Advanced Control Design of MEMS Vibratory Gyroscope

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MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophis...
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MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophis...
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  • Formats: pdf
  • ISBN: 9781614706502
  • Publication Date: 26 Jun 2020
  • Publisher: Nova Science Publishers, Inc.
  • Product language: English
  • Drm Setting: DRM