Advanced Ta-Based Diffusion Barriers for Cu Interconnects

Advanced Ta-Based Diffusion Barriers for Cu Interconnects

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Rene HubnerRene Hubner
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pdf
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45.00 £
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  • Formats: pdf
  • ISBN: 9781607416753
  • Publication Date: 1 Jan 2008
  • Publisher: Nova Science Publishers, Inc.
  • Product language: English
  • Drm Setting: DRM