Auger Electron Spectroscopy Reference Manual

Auger electron spectroscopy (AES) is based on the Auger total secondary electron energy distribution, and an ion gun to process, which involves the core-level ionization of an atom with provide depth profiling capability. subsequent deexcitation occurring by an outer-level electron de­ The high surface sensitivity of Auger spectroscopy which dictates caying to fill the core hole. The excess energy...