CMOS Cantilever Sensor Systems

This book is intended for scientists and engineers in the field of micro- and nano­ electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader w...