Directed Self-assembly of Block Co-polymers for Nano-manufacturing

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The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the wi...
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The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the wi...
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  • Formats: pdf
  • ISBN: 9780081002612
  • Publication Date: 17 Jul 2015
  • Publisher: Elsevier Science
  • Product language: English
  • Drm Setting: DRM