Early Stages of Oxygen Precipitation in Silicon

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It was fOlllld as long ago as 1954 that heating oxygen rich silicon to around 450°C produced electrical active defects - the so called thermal donors. The inference was that the donors were created by some defect produced by the aggregation of oxygen. Since then, there has been an enor­ mous amount of work carried out to elucidate the detailed mechanism by which they, and other defects, are genera...
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It was fOlllld as long ago as 1954 that heating oxygen rich silicon to around 450°C produced electrical active defects - the so called thermal donors. The inference was that the donors were created by some defect produced by the aggregation of oxygen. Since then, there has been an enor­ mous amount of work carried out to elucidate the detailed mechanism by which they, and other defects, are genera...
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  • Formats: pdf
  • ISBN: 9789400903555
  • Publication Date: 11 Nov 2013
  • Publisher: Springer Netherlands
  • Product language: English
  • Drm Setting: DRM