Femtosecond Laser Micromachining

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Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with...
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Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with...
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  • Formats: pdf
  • ISBN: 9783642233661
  • Publication Date: 5 Mar 2012
  • Publisher: Springer Berlin Heidelberg
  • Product language: English
  • Drm Setting: DRM