Fundamentals of Semiconductor Manufacturing and Process Control

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A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are int...
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A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are int...
Read more
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  • Formats: pdf
  • ISBN: 9780471790273
  • Publication Date: 11 May 2006
  • Publisher: Wiley
  • Product language: English
  • Drm Setting: DRM