
Handbook of Silicon Based MEMS Materials and Technologies
Available
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.Key topics covered include:- Silicon as MEMS material- Material properties and measurement techniques- Analytical methods used in materials characterization- Modeling in MEMS- Measuring MEMS- Micromachining technologies in MEMS- Encap...
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product_type_E-book
epub
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0.01 £
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.Key topics covered include:- Silicon as MEMS material- Material properties and measurement techniques- Analytical methods used in materials characterization- Modeling in MEMS- Measuring MEMS- Micromachining technologies in MEMS- Encap...
Read more