Handbook of Silicon Based MEMS Materials and Technologies

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.Key topics covered include:- Silicon as MEMS material- Material properties and measurement techniques- Analytical methods used in materials characterization- Modeling in MEMS- Measuring MEMS- Micromachining technologies in MEMS- Encap...
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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.Key topics covered include:- Silicon as MEMS material- Material properties and measurement techniques- Analytical methods used in materials characterization- Modeling in MEMS- Measuring MEMS- Micromachining technologies in MEMS- Encap...
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  • Formats: pdf
  • ISBN: 9780080947723
  • Publication Date: 1 Apr 2000
  • Publisher: Elsevier Science
  • Product language: English
  • Drm Setting: DRM