
Handbook of VLSI Microlithography, 2nd Edition
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This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book''s main theme is the special printing process needed to achieve volume high density IC chip production, especially in th...
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This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book''s main theme is the special printing process needed to achieve volume high density IC chip production, especially in th...
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