Measurement Technology for Micro-Nanometer Devices

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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
product_type_E-book
epub
Price
126.95 £
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
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  • Formats: epub
  • ISBN: 9781118717998
  • Publication Date: 18 Oct 2016
  • Publisher: Wiley
  • Product language: English
  • Drm Setting: DRM