Mechanical resonator for hermeticity evaluation of RF MEMS wafer-level packages

Master's Thesis from the year 2002 in the subject Electrotechnology, grade: 1.0 (A), University of Applied Sciences Berlin (FB1), language: English, abstract: Common test standards for evaluating the hermeticity of microsystempackages are unsuitable for small MEMS-devices. It is the task of this Master thesis to create a universal test device tomeasure and to compare the hermeticities of differe...