MEMS Materials and Processes Handbook

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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate m...

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244.50 £

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate m...

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  • Formats: pdf
  • ISBN: 9780387473185
  • Publication Date: 18 Mar 2011
  • Publisher: Springer US
  • Product language: English
  • Drm Setting: DRM