MicroMechatronics, Second Edition
After Uchino’s introduction of a new terminology, ‘Micromechatronics’ in 1979 for describing the application area of ‘piezoelectric actuators’, the rapid advances in semiconductor chip technology have led to a new terminology MEMS
(micro-electro-mechanical-system) or even NEMS (nano-electro-mechanicalsystem) to describe mainly thin film sensor/actuator devices, a narrower area of micromechatronics ...
After Uchino’s introduction of a new terminology, ‘Micromechatronics’ in 1979 for describing the application area of ‘piezoelectric actuators’, the rapid advances in semiconductor chip technology have led to a new terminology MEMS
(micro-electro-mechanical-system) or even NEMS (nano-electro-mechanicalsystem) to describe mainly thin film sensor/actuator devices, a narrower area of micromechatronics ...
