Microstructuring of Glasses

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As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its a...
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As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its a...
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  • Formats: pdf
  • ISBN: 9783540498889
  • Publication Date: 24 Jun 2008
  • Publisher: Springer Berlin Heidelberg
  • Product language: English
  • Drm Setting: DRM