Nanostructured Thin Film Deposition by Sputtering

Nanostructured Thin Film Deposition by Sputtering: From Fundamentals to Applications provides an exhaustive overview of the significant influence of sputtering in the production of nanostructured thin films. It begins with a review of the historical evolution and fundamental principles inherent to sputtering before delving into a thorough examination of thin films, covering their distinctive prope...