New Approaches to Image Processing based Failure Analysis of Nano-Scale ULSI Devices

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures.Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can''t keep pace with the continuous shrinking of feature size in microelectroni...