Photoresist Technology in Microsystems: Principles, Processes and Applications

This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components.  As the demand for smaller, faster, and more efficient microsystems grows, the role of photoresists in achieving high-resoluti...