Silicon Nitride for Microelectronic Applications

This survey is concerned with the use of silicon nitride in the semi­ conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3, comprises part 1 of this survey and includes preparation and properties information. This report was prepared by Hughes Aircraft Company, Culver City, California under Contract Number F336lS-70-C-1348. The work was admini­ stered under the...