Semiconductor Industrial Hygiene Handbook

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This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention...
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This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention...
Read more
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  • Formats: pdf
  • ISBN: 9780080946108
  • Publication Date: 5 Dec 2008
  • Publisher: Elsevier Science
  • Product language: English
  • Drm Setting: DRM