Part I is a supplement to the EMSL-Cincinnati publication "e;Methods for the Determination of Metals in Environmental Samples"e; and was prepared to revise and place in the Environmental Monitoring Management Council (EMMC) format certain spectrochemical methods used for metals.
New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries.
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing.
